We use cookies to enhance your experience. By continuing to browse this site you agree to our use of cookies. More info.
Let us help you with your inquiries, brochures and pricing requirements
The Filmetrics® R54-Series is the new sheet resistivity mapping tool from KLA Instruments™. It has been developed for automated mapping of 200 mm and 300 mm semiconductor and compound semiconductor wafers, and can be configured with either four-point probe (4PP) or non-contact eddy current (EC) measurement capability.
The R54 has been improved for quantifying ion doping and implant characterization, light-sensitive implant and epi wafers, resistivity measurement, and non-contact metal film thickness uniformity.
Normally, the R54 system configuration is chosen depending on the wafer size and intended application. The R54-4PP configuration is suggested for ion implant and thin metal film processes while the R54-EC configuration is perfect for quantifying thicker metal layers, sensitive surfaces, and buried conductive films. Both come in 200 mm and 300 mm versions to house bigger samples.
Listed below are the usual samples mapped by the R54:
The R54 hardware platform shares the Filmetrics F54 software interface and enclosure design, with the Filmetrics RsMapper software which is specialized for resistivity measurements.
The main features of the R54 include:
The R54-200 four-point probe (4PP) as it approaches the surface of an unpatterned wafer. Image Credit: KLA Instruments™
iMicro Nanoindenter | High Quality Material Tester for Dynamic Data Experiments
iNano Nanoindenter | High Performing Mechanical Characterization for Universities and High Tech Labs
InSEM HT Nanoindenter | High Temperature Nanoindentation Testing
Nano Indenter G200X | Nanoscale Mechanical Measurement Testing
NanoFlip In Situ Nanoindenter | Advanced Materials Mechanical Testing Tool
Precision Surface Metrology Optical Non-contact Profiler Zeta™-300
T150 UTM | Universal Testing Machine for Nanomechanical Characterization
The Alpha-Step® D-500 Stylus Profiler from KLA Instruments™
The Alpha-Step® D-600 Stylus Profiler from KLA Instruments™
The Filmetrics® F54-XY-200 for Thickness Measurement
The Tencor™ P-17 Stylus Profiler from KLA Instruments™
The Tencor™ P-7 Stylus Profiler from KLA Instruments™
Zeta™-388 Automated Optical Profiler
AZoNano.com - An AZoNetwork Site
Owned and operated by AZoNetwork, © 2000-2022